SOLID-PHASE REDUCTION OF SIO2 IN THE PRESENCE OF AN AL LAYER

被引：14
|
作者：
BLATTNER, RJ [1 ]
BRAUNDMEIER, AJ [1 ]
机构：
[1] SO ILLINOIS UNIV,DEPT PHYS,EDWARDSVILLE,IL 62025
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期
关键词：
D O I：
10.1116/1.571292
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：320 / 323
页数：4
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