LASER-INDUCED ETCHING OF METALS

被引：0
|
作者：
HUSSLA, I
VISWANATHAN, R
机构：
[1] LEYBOLD HERAEUS GMBH,D-6450 HANAU 1,FED REP GER
[2] BELOIT COLL,BELOIT,WI 53511
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8B期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C433 / C433
页数：1
相关论文
共 50 条
  • [41] LASER-INDUCED ETCHING OF GAAS IN OXIDIZING AND REDUCING MEDIA
    SVORCIK, V
    RYBKA, V
    CHEMICAL PHYSICS LETTERS, 1989, 164 (05) : 549 - 551
  • [42] Laser-induced reactive microplasma for etching of fused silica
    Ehrhardt, Martin
    Lorenz, Pierre
    Han, Bing
    Zimmer, Klaus
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2020, 126 (11):
  • [43] Laser-induced dry etching of integrated InP microlenses
    Siemens Corporate Technology, Munich, Germany
    Applied Physics A: Materials Science and Processing, 1997, 65 (4-5): : 349 - 353
  • [44] Effect of laser-induced etching process on Porous structures
    Al-Khazraji, Kahtan K.
    Rasheeda, Bassam G.
    Ibrahem, Mohemmed A.
    Mohammed, Anna F.
    INTERNATIONAL CONFERENCE ON MODELLING OPTIMIZATION AND COMPUTING, 2012, 38 : 1381 - 1390
  • [45] Thermoplasmonic laser-induced backside wet etching of sapphire
    Tsvetkov, M. Yu
    Minaev, N., V
    Akovantseva, A. A.
    Timashev, P. S.
    Muslimov, A. E.
    Kanevskii, V. M.
    QUANTUM ELECTRONICS, 2019, 49 (02) : 133 - 140
  • [46] Laser-induced dry etching of integrated InP microlenses
    Matz, R
    Weber, H
    Weimann, G
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 65 (4-5): : 349 - 353
  • [47] LASER-INDUCED PHOTOCHEMICAL ETCHING OF INP BY HBR AND HCL
    MEILER, J
    MATZ, R
    HAARER, D
    APPLIED SURFACE SCIENCE, 1989, 43 : 416 - 423
  • [48] Laser-induced local CVD and simultaneous etching of tungsten
    Tóth, Z
    Piglmayer, K
    APPLIED SURFACE SCIENCE, 2002, 186 (1-4) : 184 - 189
  • [49] LASER-INDUCED ETCHING OF INP USING 2 LASER FREQUENCIES SIMULTANEOUSLY
    GREBEL, H
    PIEN, P
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) : 2428 - 2432
  • [50] Laser-induced etching of InP using two laser frequencies simultaneously
    Grebel, H.
    Pien, P.
    Journal of Applied Physics, 1992, 71 (05):
12345