共 50 条
- [1] EXCIMER LASER-INDUCED ETCHING OF SEMICONDUCTORS AND METALS ELECTRICAL COMMUNICATION, 1988, 62 (3-4): : 222 - 228
- [2] LASER-INDUCED CHEMICAL ETCHING OF METALS AND SEMICONDUCTORS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 790 - 791
- [3] Excimer laser-induced etching of semiconductors and metals Electrical communication, 1988, 62 (3-4): : 222 - 228
- [5] LASER-INDUCED ETCHING OF SILICON APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 61 (01): : 45 - 50