ATTRACTIVE MODE FORCE MICROSCOPY USING A FEEDBACK-CONTROLLED FIBER INTERFEROMETER

被引:9
|
作者
NONNENMACHER, M
VAEZIRAVANI, M
WICKRAMASINGHE, HK
机构
[1] ROCHESTER INST TECHNOL,CTR IMAGING SCI,POB 9887,ROCHESTER,NY 14623
[2] IBM DEUTSCHLAND GMBH,W-7032 SINDELFINGEN,GERMANY
[3] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 11期
关键词
D O I
10.1063/1.1143405
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present a force microscope which uses a feedback-controlled differential fiber interferometer for the measurement of the deflection of the force-sensing cantilever. Due to the differential principle, and the feedback control, the influence of thermal and mechanical drifts or fluctuations is minimized. Topographic images in both modes, the attractive ac mode and the repulsive dc mode, have been taken to demonstrate a first performance of the instrument.
引用
收藏
页码:5373 / 5376
页数:4
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