共 50 条
- [32] Compensation effect during water desorption from siloxane-based spin-on dielectric thin films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01): : 303 - 306
- [34] Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing RAPID THERMAL PROCESSING, 1999, 84 : 231 - 236
- [35] New reflowable organic spin-on glass for advanced interlevel dielectric planarization Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), 1995, 78 (10): : 65 - 72
- [38] ION-BEAM IRRADIATION EFFECT ON SOLUBILITY OF SPIN-ON GLASS TO METHANOL NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1128 - 1131
- [39] New reflowable organic spin-on glass for advanced interlevel dielectric planarization ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1995, 78 (10): : 65 - 72