共 50 条
- [1] Thermal desorption development of spin-on glass for electron beam nanolithography [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (1-3): : L68 - L70
- [2] Thermal desorption development of spin-on glass for electron beam nanolithography [J]. Japanese Journal of Applied Physics, Part 2: Letters, 2006, 45 (1-3):
- [7] Selective Removal of Ashed Spin-on Glass (SOG) [J]. SEMICONDUCTOR CLEANING SCIENCE AND TECHNOLOGY 13 (SCST 13), 2013, 58 (06): : 267 - 271
- [10] Improved spin-on glass process with multilevel metallization [J]. ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1996, 79 (01): : 75 - 82