Integrated design of MEMS: aiming at manufacturability

This paper is a first attempt to qualify the design process in the field of MEMS product. Through this study, we try to analyse how the issue of manufacturability is addressed in a context of integrated design. This implies to understand specificities of the manufacturing process involved in the realization of these products (we focus on process derived from VLSI industry). Then we look at the main current design methodologies to understand how the manufacturing is being taken into account. Computer aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need of specifications for a design methodology that would provide designers with greater independence from manufacturing constraints.