ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS

被引：215
|
作者：
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期
关键词：
D O I：
10.1063/1.333196
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1029 / 1034
页数：6
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