DC MAGNETRON GLOW-DISCHARGE AMORPHOUS-SILICON

被引：9

作者：

SMITH, GB ^{[1
]}

MCKENZIE, DR ^{[1
]}

机构：

[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA

来源：

SOLAR ENERGY MATERIALS | 1984年 / 11卷 / 1-2期

关键词：

D O I：

10.1016/0165-1633(84)90027-3

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：45 / 56

页数：12

共 50 条

[21] THE EFFECT OF FILM THICKNESS ON THE REFLECTIVITY OF GLOW-DISCHARGE AMORPHOUS-SILICON
DONNADIEU, A
WEISER, G
BEICHLER, J
SOLAR ENERGY MATERIALS, 1981, 4 (04): : 455 - 459
[22] FREQUENCY-DEPENDENT LOSS IN GLOW-DISCHARGE AMORPHOUS-SILICON
SHIMAKAWA, K
LONG, AR
ANDERSON, MJ
IMAGAWA, O
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 623 - 626
[23] DEPOSITION TECHNIQUE FOR AMORPHOUS-SILICON - GLOW-DISCHARGE DECOMPOSITION OF SILANE
MATSUDA, A
DENKI KAGAKU, 1984, 52 (07): : 398 - 402
[24] FREQUENCY-DEPENDENT TRANSPORT IN GLOW-DISCHARGE AMORPHOUS-SILICON
SHIMAKAWA, K
WATANABE, A
HATTORI, K
IMAGAWA, O
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 54 (05): : 391 - 414
[25] DENSITY OF STATES IN AMORPHOUS-SILICON PRODUCED BY MICROWAVE GLOW-DISCHARGE
AKTIK, M
CURRIE, JF
YELON, A
JOURNAL OF APPLIED PHYSICS, 1982, 53 (01) : 439 - 441
[26] BIAS EFFECTS ON PREPARATION OF AMORPHOUS-SILICON IN A TRIODE GLOW-DISCHARGE
AOZASA, M
PYON, RG
ANDO, K
THIN SOLID FILMS, 1986, 136 (02) : 263 - 274
[27] EFFECT OF POWER AND PRESSURE ON THE PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY DC GLOW-DISCHARGE
SETH, T
DIXIT, PN
PANWAR, OS
BHATTACHARYYA, R
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1993, 31 (02) : 215 - 226
[28] MECHANISMS INVOLVED IN THE GLOW-DISCHARGE DEPOSITION OF DOPED HYDROGENATED AMORPHOUS-SILICON
KAMPAS, FJ
VANIER, PE
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 25 - 29
[29] INSITU ELLIPSOMETRY STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY GLOW-DISCHARGE
COLLINS, RW
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 514 - 517
[30] BIAS EFFECTS ON THE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILM IN A GLOW-DISCHARGE
ANDO, K
AOZASA, M
PYON, RG
APPLIED PHYSICS LETTERS, 1984, 44 (04) : 413 - 415

← 1 2 3 4 5 →