STUDY OF THE OPTICAL-PROPERTIES OF IN-0.52(ALXGA1-X)(0.48)AS BY VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY

被引：5

作者：

PAN, JW ^{[1
]}

SHIEH, JL ^{[1
]}

GAU, JH ^{[1
]}

CHYI, JI ^{[1
]}

LEE, JC ^{[1
]}

LING, KJ ^{[1
]}

机构：

[1] FU JEN CATHOLIC UNIV,DEPT PHYS,TAIPEI 24205,TAIWAN

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 78卷 / 01期

关键词：

D O I：

10.1063/1.360624

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The optical properties of In0.52(AlxGa 1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x2-0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between the results and the reported data is presented. © 1995 American Institute of Physics.

引用

页码：442 / 445

页数：4

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