MODIFICATION OF METAL-SILICON CONTACTS BY LOW-ENERGY ARGON ION-BOMBARDMENT

被引：4
|
作者：
CHOUIYAKH, A [1 ]
LANG, B [1 ]
机构：
[1] UNIV STRASBOURG 1, F-67070 STRASBOURG, FRANCE
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1984年 / 19卷 / 12期
关键词：
D O I：
10.1051/rphysap:019840019012097100
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：971 / 978
页数：8
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