SI OXIDE FORMATION AT MO/SI INTERFACE

被引：2
|
作者：
IWATA, S
YAMAMOTO, N
KOBAYASHI, N
机构：
来源：
JOURNAL OF THE JAPAN INSTITUTE OF METALS | 1987年 / 51卷 / 02期
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D O I：
10.2320/jinstmet1952.51.2_138
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页码：138 / 141
页数：4
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