NEAR-SURFACE DAMAGE INDUCED IN POLYIMIDES BY ION-BEAM ETCHING

被引：8
|
作者：
VANDERLINDE, WE [1 ]
MILLS, PJ [1 ]
KRAMER, EJ [1 ]
RUOFF, AL [1 ]
机构：
[1] CORNELL UNIV,CTR MAT SCI,ITHACA,NY 14853
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期
关键词：
D O I：
10.1116/1.582994
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1362 / 1364
页数：3
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