FAST CRYOPUMP REGENERATION FOR SPUTTERING APPLICATIONS

被引：0
|
作者：
MUNDINGER, HJ
BOOTH, G
机构：
来源：
SOLID STATE TECHNOLOGY | 1994年 / 37卷 / 06期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new procedure for rapid cryopump regeneration is described which, in one application, reduced regeneration time for three pumps to under 1 hour, increased system availability by 25%, and reduced vacuum system maintenance by more than 50%.
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页码：77 / &
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