TRANSIENT ANNEALING FOR THE PRODUCTION OF N+ CONTACT LAYERS IN GAAS

被引：16
|
作者：
SEALY, BJ
BENSALEM, R
PATEL, KK
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 6卷 / 1-2期
关键词：
D O I：
10.1016/0168-583X(85)90653-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：325 / 329
页数：5
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