CONTROL OF ETCHING PROCESSES IN A LOW-TEMPERATURE GAS-DISCHARGE PLASMA (SURVEY)

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作者：
DANILIN, BS
KIREEV, VY
KAPLIN, VA
VRUBLEVSKII, EM
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INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1982年 / 25卷 / 01期
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T [工业技术];
学科分类号：
08 ;
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页码：7 / 25
页数：19
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