DEFORMATION OF SILICON AT LOW-TEMPERATURES

被引:79
|
作者
HILL, MJ [1 ]
ROWCLIFFE, DJ [1 ]
机构
[1] BROWN BOVERI RES CTR, CH-5401 BADEN, SWITZERLAND
关键词
D O I
10.1007/BF00540753
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1569 / 1576
页数:8
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