FABRICATION OF HIGH NUMERICAL APERTURE ZONE PLATES USING DEEP ULTRAVIOLET LITHOGRAPHY

被引：6
|
作者：
KODATE, K [1 ]
TAKENAKA, H [1 ]
KAMIYA, T [1 ]
机构：
[1] UNIV TOKYO,DEPT ELECTR ENGN,BUNKYO KU,TOKYO 113,JAPAN
来源：
APPLIED OPTICS | 1984年 / 23卷 / 03期
关键词：
D O I：
10.1364/AO.23.000504
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：504 / 507
页数：4
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