SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH PALLADIUM SILICIDE LAYERS

被引：36
|
作者：
CANALI, C [1 ]
CAMPISANO, SU [1 ]
LAU, SS [1 ]
LIAU, ZL [1 ]
MAYER, JW [1 ]
机构：
[1] CALTECH,PASADENA,CA 91125
来源：
JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 07期
关键词：
D O I：
10.1063/1.322026
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2831 / 2836
页数：6
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