CHEMISTRY OF SPUTTERED MOLYBDENUM-DISULFIDE FILMS

被引:95
|
作者
STEWART, TB [1 ]
FLEISCHAUER, PD [1 ]
机构
[1] AEROSPACE CORP,CHEM & PHYS LAB,EL SEGUNDO,CA 90245
关键词
D O I
10.1021/ic00136a060
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
引用
收藏
页码:2426 / 2431
页数:6
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