ELECTRICAL CHARACTERISTICS OF FAST RADIATIVELY PROCESSED TITANIUM SILICIDES THIN-FILMS

被引：12
|
作者：
WEI, CS
VANDERSPIEGEL, J
SANTIAGO, J
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期
关键词：
D O I：
10.1116/1.572903
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2259 / 2263
页数：5
相关论文
共 50 条
  • [31] XPS STUDY OF THIN-FILMS OF TITANIUM OXYSULFIDES
    GONBEAU, D
    GUIMON, C
    PFISTERGUILLOUZO, G
    LEVASSEUR, A
    MEUNIER, G
    DORMOY, R
    SURFACE SCIENCE, 1991, 254 (1-3) : 81 - 89
  • [32] IDENTIFICATION OF TITANIUM DISILICIDE THIN-FILMS BY SIMS
    ANTONOV, SL
    BELEVSKY, VI
    GUSEV, IV
    ORLIKOVSKY, AA
    VALIEV, KA
    VASILIEV, AG
    VACUUM, 1992, 43 (5-7) : 635 - 636
  • [33] REACTIVELY SPUTTERED TITANIUM BORIDE THIN-FILMS
    BLOM, HO
    LARSSON, T
    BERG, S
    OSTLING, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02): : 162 - 165
  • [34] ON THE INTERFACE BETWEEN IRON AND THIN-FILMS OF TITANIUM AND TITANIUM NITRIDE
    CARBUCICCHIO, M
    PALOMBARINI, G
    HYPERFINE INTERACTIONS, 1990, 57 (1-4): : 1783 - 1788
  • [35] PHOTODEPOSITION SPUTTERING OF TITANIUM AND TIN THIN-FILMS
    NENADOVIC, TM
    MIHAC, TP
    RAKOCEVIC, ZL
    THIN SOLID FILMS, 1992, 218 (1-2) : 247 - 251
  • [36] MICROSTRUCTURE AND PROPERTIES OF LASER AND PLASMA PROCESSED THIN-FILMS
    NARAYAN, J
    JOURNAL OF METALS, 1988, 40 (11): : 25 - 25
  • [37] ELECTRICAL PROPERTIES OF THIN TITANIUM FILMS
    CHANDER, R
    HOWARD, RE
    JAIN, SC
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1967, 5 (09) : 397 - &
  • [38] ELECTRICAL CHARACTERISTICS OF RF-SPUTTERED CDTE THIN-FILMS FOR PHOTOVOLTAIC APPLICATIONS
    DAS, MB
    KRISHNASWAMY, SV
    PETKIE, R
    SWAB, P
    VEDAM, K
    SOLID-STATE ELECTRONICS, 1984, 27 (04) : 329 - 337
  • [39] ELECTRICAL CHARACTERISTICS OF ZINC-SULFIDE THIN-FILMS DEPOSITED BY VARIOUS METHODS
    ORENT, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (05) : 1320 - 1325
  • [40] ELECTRICAL AND OPTICAL CHARACTERISTICS OF THIN-FILMS OF GA2SE3
    PERSIN, M
    CELUSTKA, B
    POPOVIC, S
    PERSIN, A
    THIN SOLID FILMS, 1976, 37 (02) : L61 - L62
12345