A NEW ETCH CHAMBER AND ETCHING PROCEDURES FOR CR-39

被引：0
|
作者：
HOMANN, SG
HANKINS, DE
BELL, DB
MECOZZI, JM
机构：
[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB, LIVERMORE, CA 94550 USA
[2] SYDIS INC, SAN JOSE, CA 95134 USA
[3] RADIAT DETECT CO, SUNNYVALE, CA 94086 USA
来源：
HEALTH PHYSICS | 1984年 / 47卷 / 01期
关键词：
D O I：
暂无
中图分类号：
X [环境科学、安全科学];
学科分类号：
08 ; 0830 ;
摘要：
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页码：176 / 176
页数：1
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