ADVANCING THE STATE-OF-THE-ART IN HIGH-PERFORMANCE LOGIC AND ARRAY TECHNOLOGY

被引：10
|
作者：
BROWN, KH
GROSE, DA
LANGE, RC
NING, TH
TOTTA, PA
机构：
[1] IBM CORP, TECHNOL PROD, ESSEX JCT, VT 05452 USA
[2] IBM CORP, DIV RES, TJ WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1992年 / 36卷 / 05期
关键词：
D O I：
10.1147/rd.365.0821
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
High-speed silicon bipolar technology continues to meet the demands of integrated circuits for mainframe computers. IBM has developed an advanced bipolar logic and high-speed array technology for its Enterprise System/9000TM systems. This technology, code-named ATX-4, is composed of trench-isolated, double-polysilicon self-aligned bipolar devices, and has four fully planarized wiring levels with interlevel connecting studs. Chip fabrication has been implemented in 1-mum ground rules and is in full-scale manufacturing. ATX-4 represents a significant advance in providing higher-speed and lower-power logic at increased levels of integration compared with that of the ATX-1 technology used in previous generations. An overview of the design and integration of ATX-4 is discussed.
引用
收藏
页码：821 / 828
页数：8
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