MEASUREMENTS OF 2 ROUGHNESS PARAMETERS UNDER SPECKLE PATTERN ILLUMINATION

被引：7
|
作者：
YOSHIMURA, T
KATO, K
MORINO, N
NAKAGAWA, K
机构：
[1] Department of Instrumentation Engineering, Faculty of Engineering, Kobe University, Kobe, 657, Rokkodai, Nada
来源：
OPTICS COMMUNICATIONS | 1990年 / 75卷 / 3-4期
关键词：
D O I：
10.1016/0030-4018(90)90519-Y
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new method to measure the surface roughness under speckle pattern illumination has been investigated. Although this method requires to measure the second order moment of the integrated intensity in the far field under two different-experimental conditions, the two roughness parameters of the root-mean-square value and the correlation length of the surface profile are uniquely determined. © 1990.
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页码：208 / 214
页数：7
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