FIELD-EMITTER ARRAY PERFORMANCE ENHANCEMENT USING HYDROGEN GLOW-DISCHARGES

被引：33
|
作者：
SCHWOEBEL, PR
SPINDT, CA
机构：
[1] Physical Electronics Laboratory, SRI International, Menlo Park
来源：
APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.109741
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The changes in the current-voltage characteristics and electron emission spatial distribution of microfabricated field emitters following exposure to hydrogen low-pressure glow discharges have been investigated. The hydrogen discharge was found to result in a work function decrease typically between 0.5 and 1.5 eV following a dose of 10(18)-10(19) ions/cm2. The net result is a reduction in the operating voltage and an improvement in the spatial uniformity of the electron emission.
引用
收藏
页码：33 / 35
页数：3
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