APPLICATION OF AES TO STUDY OF SELECTIVE SPUTTERING OF THIN-FILMS

被引：83
|
作者：
VANOOSTROM, A [1 ]
机构：
[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词：
D O I：
10.1116/1.568856
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：224 / 227
页数：4
相关论文
共 50 条
  • [41] CRYSTALLINITY AND MORPHOLOGY OF SUPERCONDUCTING THIN-FILMS PREPARED BY SPUTTERING
    TANAKA, S
    ITOZAKI, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (03): : L441 - L443
  • [42] COMPOSITION OF THIN-FILMS FORMED BY ION SPUTTERING OF ALLOYS
    PRANEVICIUS, L
    PURAS, R
    TAMULEVICIUS, S
    VOSYLIUS, J
    THIN SOLID FILMS, 1981, 85 (3-4) : 315 - 315
  • [43] HIGH-QUALITY SUPERCONDUCTING THIN-FILMS BY SPUTTERING
    DONG, ZW
    LIU, GR
    YANG, BC
    XIONG, GC
    YANG, QS
    ZHAO, ZX
    PHYSICA C, 1991, 185 : 1953 - 1954
  • [44] STOICHIOMETRIC STUDY ON POLYCRYSTALLINE ASGA THIN-FILMS DEPOSITED BY RF-SPUTTERING
    CARCHANO, H
    LALANDE, F
    LOUSSIER, R
    THIN SOLID FILMS, 1984, 120 (01) : 47 - 54
  • [45] FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING
    TANAKA, K
    HIGUMA, Y
    YOKOYAMA, K
    NAKAGAWA, T
    HAMAKAWA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) : 1381 - 1382
  • [46] HYDROGEN SPUTTERING OF CARBON THIN-FILMS DEPOSITED ON PLATINUM
    SMITH, JN
    MEYER, CH
    LAYTON, JK
    JOURNAL OF NUCLEAR MATERIALS, 1977, 67 (1-2) : 234 - 235
  • [47] ION SPUTTERING YIELD MEASUREMENTS FOR SUBMICROMETER THIN-FILMS
    VEISFELD, N
    GELLER, JD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 2077 - 2081
  • [48] HETEROEPITAXY OF GERMANIUM THIN-FILMS ON SILICON BY ION SPUTTERING
    ALEKSANDROV, LN
    LOVYAGIN, RN
    PCHELYAKOV, OP
    STENIN, SI
    JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) : 298 - 301
  • [49] HIGH JC SUPERCONDUCTING THIN-FILMS PREPARED BY SPUTTERING
    ITOZAKI, H
    TANAKA, S
    HIGAKI, K
    YAZU, S
    PHYSICA C, 1988, 153 : 1155 - 1158
  • [50] RF SPUTTERING OF LINBO3 THIN-FILMS
    HEWIG, GH
    JAIN, K
    SEQUEDA, FO
    TOM, R
    WANG, PW
    THIN SOLID FILMS, 1982, 88 (01) : 67 - 74
12345