PROCESS FOR FORMING PASSIVATED METAL INTERCONNECTION SYSTEM WITH A PLANAR SURFACE

被引:50
|
作者
ROTHMAN, LB
机构
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D O I
10.1149/1.2119902
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1131 / 1136
页数:6
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