SIMOX SOI FOR INTEGRATED-CIRCUIT FABRICATION

被引：10
|
作者：
HON, WL
机构：
来源：
IEEE CIRCUITS AND DEVICES MAGAZINE | 1987年 / 3卷 / 04期
关键词：
D O I：
10.1109/MCD.1987.6323126
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：6 / 11
页数：6
相关论文
共 50 条
  • [1] DEIONIZED WATER FOR INTEGRATED-CIRCUIT FABRICATION
    SAVOLA, WG
    WALLACE, JT
    [J]. SOLID STATE TECHNOLOGY, 1973, 16 (11) : 47 - 49
  • [2] SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION
    WEBER, EV
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 333 : 94 - 97
  • [3] INTEGRATED-CIRCUIT FABRICATION - A PROCESS OVERVIEW
    SEQUEDA, FO
    [J]. JOURNAL OF METALS, 1985, 37 (05): : 43 - 50
  • [4] SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION
    WEBER, EV
    [J]. OPTICAL ENGINEERING, 1983, 22 (02) : 190 - 194
  • [5] THIN SOI STRUCTURES FOR SENSING AND INTEGRATED-CIRCUIT APPLICATIONS
    CHUNG, GS
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1993, 39 (03) : 241 - 251
  • [6] LASER ACTIVATED FLOW FOR INTEGRATED-CIRCUIT FABRICATION
    DELFINO, M
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 385 : 32 - 37
  • [7] STATE OF ART OF INTEGRATED-CIRCUIT MASK FABRICATION
    CAPOCACCIA, F
    [J]. ELETTROTECNICA, 1973, 60 (02): : 131 - 140
  • [8] INTEGRATED-CIRCUIT FABRICATION TECHNOLOGY - ELLIOT,DJ
    FORDEMWALT, JN
    [J]. IEEE SPECTRUM, 1983, 20 (08) : 14 - &
  • [9] DISPATCHING IN AN INTEGRATED-CIRCUIT WAFER FABRICATION LINE
    JOHRI, PK
    [J]. 1989 WINTER SIMULATION CONFERENCE PROCEEDINGS, 1989, : 918 - 921
  • [10] Characterization of a Three-Dimensional SOI Integrated-Circuit Technology
    Chen, C. K.
    Checka, N.
    Tyrrell, B. M.
    Chen, C. L.
    Wyatt, P. W.
    Yost, D. R. W.
    Knecht, J. M.
    Kedzierski, J. T.
    Keast, C. L.
    [J]. 2008 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, 2008, : 109 - 110
12345