SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION

被引：1

作者：

WEBER, EV

机构：

来源：

关键词：

D O I：

10.1117/12.7973080

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：190 / 194

页数：5

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[1] SHAPED BEAMS FOR INTEGRATED-CIRCUIT FABRICATION
WEBER, EV
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 333 : 94 - 97
[2] DEIONIZED WATER FOR INTEGRATED-CIRCUIT FABRICATION
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WALLACE, JT
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[3] INTEGRATED-CIRCUIT FABRICATION - A PROCESS OVERVIEW
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[4] SIMOX SOI FOR INTEGRATED-CIRCUIT FABRICATION
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[J]. IEEE CIRCUITS AND DEVICES MAGAZINE, 1987, 3 (04): : 6 - 11
[5] INTEGRATED-CIRCUIT PRODUCTION WITH ELECTRON-BEAMS
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1028 - 1032
[6] LASER ACTIVATED FLOW FOR INTEGRATED-CIRCUIT FABRICATION
DELFINO, M
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 385 : 32 - 37
[7] STATE OF ART OF INTEGRATED-CIRCUIT MASK FABRICATION
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[8] INTEGRATED-CIRCUIT FABRICATION TECHNOLOGY - ELLIOT,DJ
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[J]. IEEE SPECTRUM, 1983, 20 (08) : 14 - &
[9] DISPATCHING IN AN INTEGRATED-CIRCUIT WAFER FABRICATION LINE
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[J]. 1989 WINTER SIMULATION CONFERENCE PROCEEDINGS, 1989, : 918 - 921
[10] ELECTRON-BEAM LITHOGRAPHY FOR INTEGRATED-CIRCUIT FABRICATION
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