ELECTRON SPECTROMETER TRANSMISSION FUNCTIONS FOR QUANTITATIVE AES AND XPS

Experimental data of the transmission functions for quantitative AES and XPS of the electron spectrometers PHI Perkin Elmer 660 and 590 SAM Systems, VG Scientific Microlab MkII in the main modes of signal registration are given. The method of T(E) calibration is based on utilization of a reference copper background electron spectrum. The influences of energy resolution, constant retarding ratio and constant analyzer energy modes, multiplier voltage etc. on the T(E) behaviour are considered. The transformations of copper background electron spectrum shape against the primary electron beam energy, the angle of incidence of the electron beam and the angle of emission are given. Recommendations for the T(E) calibration for quantitative XPS analysis are made.