Deposition Techniques for Transparent Conducting Thin-Films on Glass and Polymer Substrates

被引:0
|
作者
Abendroth, Thomas [1 ,2 ]
Liebich, Jens [1 ]
Haertel, Paul [1 ]
Schumm, Benjamin [1 ]
Althues, Holger [1 ]
Kaskel, Stefan [1 ]
Beyer, Eckhard [1 ]
机构
[1] Univ Dresden, Fraunhofer Inst Werkstoff & Strahltechnik IWS, Dresden, Germany
[2] Univ Dresden, Fraunhofer Inst Werkstoff & Strahltechnik IWS, Chem Oberflachentechnol, Winterbergstrabe 28, D-01277 Dresden, Germany
关键词
D O I
10.1002/vipr.201500583
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
We report on thin films deposited at atmospheric pressures on glass and polymer substrates with various techniques. The introduced thin-film materials show intrinsic properties being suitable for different applications while maintaining the principle properties of the substrates themselves (e.g. shape. rigidity/flexibility, transparency). With the main focus on optical and electronic applications the properties of the deposited films can be adjusted by the choice of coating material (e.g. metal oxide, CNT), the film's shape (compact, particulate) and the deposition process itself. We compare deposition and properties of different TCO-materials with CNT-based thin film techniques and demonstrate approaches for the integration of these processes in production lines.
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页码:36 / 40
页数:5
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