DEPOSITION OF TRANSPARENT CONDUCTING INDIUM TIN OXIDE THIN-FILMS BY REACTIVE ION PLATING

被引：0
|
作者：
CUI, YR [1 ]
XU, XH [1 ]
JIN, ZT [1 ]
PENG, CC [1 ]
XIE, SY [1 ]
机构：
[1] CHANGSHA INST TECHNOL,CHANGSHA,PEOPLES R CHINA
来源：
THIN SOLID FILMS | 1984年 / 115卷 / 03期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：195 / 201
页数：7
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