ACCELERATED DIFFUSION OF PHOSPHORUS IN SILICON

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作者：

PITANOV, VS

KORNFELD, IN

ILINA, TN

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来源：

INORGANIC MATERIALS | 1984年 / 20卷 / 09期

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T [工业技术];

学科分类号：

08 ;

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页码：1361 / 1362

页数：2

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