SOURCES OF OXIDATION INDUCED STACKING-FAULTS IN CZOCHRALSKI SILICON WAFERS - ONE-TO-ONE CORRELATION WITH BULK DEFECTS

被引：0
|
作者：
ROZGONYI, GA [1 ]
MAHAJAN, S [1 ]
READ, MH [1 ]
BRASEN, D [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 08期
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C275 / C275
页数：1
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