ADHESION OF TITANIUM THIN-FILM TO OXIDE SUBSTRATES

被引：26
|
作者：
KIM, YH
CHAUG, YS
CHOU, NJ
KIM, J
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 05期
关键词：
D O I：
10.1116/1.574259
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2890 / 2893
页数：4
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