INFLUENCE OF SUBSTRATE TEMPERATURE ON INTRINSIC STRESS AND ADHESION OF EVAPORATED-FILMS

被引：0
|
作者：
KUBOVY, A [1 ]
JANDA, M [1 ]
机构：
[1] RES INST ELECTROTECH CERAMICS, CS-50064 HRADEC KRALOVE, CZECHOSLOVAKIA
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1976年 / 26卷 / 08期
关键词：
D O I：
10.1007/BF01589699
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：957 / 960
页数：4
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