INFLUENCE OF SUBSTRATE TEMPERATURE ON INTRINSIC STRESS AND ADHESION OF EVAPORATED-FILMS

被引：0

作者：

KUBOVY, A ^{[1
]}

JANDA, M ^{[1
]}

机构：

[1] RES INST ELECTROTECH CERAMICS, CS-50064 HRADEC KRALOVE, CZECHOSLOVAKIA

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS | 1976年 / 26卷 / 08期

关键词：

D O I：

10.1007/BF01589699

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：957 / 960

页数：4

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