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- [7] PLASMA-ETCHING OF SILICON WITH NITROGEN TRIFLUORIDE[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C89 - C89EISELE, KM
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- [10] PLASMA-ETCHING OF POLYSILICON AND SILICON DIOXIDE IN A PARALLEL-PLATE REACTOR[J]. ACTA PHYSICA SLOVACA, 1985, 35 (03) : 156 - 161MIKUS, O