EVALUATION OF SURFACE-ROUGHNESS PARAMETERS OF METAL-FILMS BY LIGHT-SCATTERING TECHNIQUE

被引：19

|

作者：

NAOI, Y

FUKUI, M

机构：

来源：

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1989年 / 58卷 / 12期

关键词：

D O I：

10.1143/JPSJ.58.4511

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：4511 / 4516

页数：6

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