REDEPOSITION IN AES SPUTTER DEPTH PROFILING OF MULTILAYER CR/NI THIN-FILMS

被引：16

作者：

ZALAR, A ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES, D-7000 STUTTGART 80, GERMANY

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 12卷 / 1-12期

关键词：

D O I：

10.1002/sia.740120204

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Films

引用

页码：83 / 86

页数：4

共 50 条

[1] INFLUENCE OF ION ENERGY, INCIDENCE ANGLE AND SURFACE-ROUGHNESS ON DEPTH RESOLUTION IN AES SPUTTER PROFILING OF MULTILAYER CR/NI THIN-FILMS
ZALAR, A
HOFMANN, S
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 18 (4-6): : 655 - 658
[2] ION-BEAM INDUCED ROUGHNESS AND ITS EFFECT IN AES DEPTH PROFILING OF MULTILAYER NI/CR THIN-FILMS
BARNA, A
BARNA, PB
ZALAR, A
[J]. SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) : 144 - 150
[3] AUGER SPUTTER DEPTH PROFILING ANALYSIS OF NI/CR MULTILAYER THIN-FILM
OGIWARA, T
TANUMA, S
[J]. BUNSEKI KAGAKU, 1992, 41 (12) : T157 - T161
[4] SPUTTER DEPTH PROFILING OF THIN-FILMS WITH LEIS AND LENRS
PURANIK, SG
KING, BV
[J]. APPLIED SURFACE SCIENCE, 1987, 28 (02) : 180 - 186
[5] Oxide thin films formed during rotational AES sputter depth profiling of Ni/Cr multilayers using oxygen ions
Zalar, A
Seibt, EW
Panjan, P
[J]. APPLIED SURFACE SCIENCE, 1996, 100 : 92 - 96
[6] INTERFACE WIDTH DEPENDENCE ON SAMPLE TEMPERATURE DURING AUGER SPUTTER DEPTH PROFILING OF CR/NI MULTILAYERED THIN-FILMS
TANOVIC, N
TANOVIC, L
FINE, J
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 67 (1-4): : 491 - 494
[7] Sputter depth profiling of thin films
Hofmann, S
[J]. HIGH TEMPERATURE MATERIALS AND PROCESSES, 1998, 17 (1-2) : 13 - 27
[8] AES DEPTH PROFILE STUDIES OF INTERDIFFUSION IN THE AG-CU BILAYER AND MULTILAYER THIN-FILMS
BUKALUK, A
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 118 (01): : 99 - 107
[9] SIGNIFICANCE OF SAMPLE ROTATION IN AUGER-ELECTRON SPECTROSCOPY SPUTTER DEPTH PROFILING OF THIN-FILMS
ZALAR, A
[J]. THIN SOLID FILMS, 1990, 193 (1-2) : 258 - 269
[10] AES DEPTH PROFILING OF A NEW TYPE OF MULTILAYER STRUCTURE COMPOSED OF CR/NI LAYERS OF VARIOUS THICKNESSES
ZALAR, A
PANJAN, P
HOFMANN, S
[J]. THIN SOLID FILMS, 1989, 181 : 277 - 283

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