PRODUCTION HIGH-ENERGY ION IMPLANTERS WITH MILLIAMPERE BEAM CAPABILITIES

被引：2
|
作者：
BOISSEAU, P [1 ]
DART, A [1 ]
DENHOLM, AS [1 ]
GLAVISH, HF [1 ]
LIBBY, B [1 ]
SIMCOX, G [1 ]
机构：
[1] ION MICROFABRICAT SYST INC,DANVERS,MA 01923
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
关键词：
D O I：
10.1016/0168-583X(89)90254-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：591 / 595
页数：5
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