NANOMETER RESOLUTION ANALYSIS OF SURFACES

被引：3
|
作者：
KRUIT, P
机构：
[1] Department of Applied Physics, Delft University of Technology, 2628 CJ Delft
来源：
SURFACE SCIENCE | 1993年 / 287卷 / pt B期
关键词：
D O I：
10.1016/0039-6028(93)91128-C
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In modern scanning transmission electron microscopes, equipped with a field emission gun and operating at 100-200 keV, a probe current of 1 nA in a 1 nm spot is obtainable. The sample to be studied is then immersed in a strong magnetic field. We have demonstrated the possibility to energy-analyze the electrons, emitted from the surface, with high detection efficiency. For thin samples, the option of measuring the energy loss of the transmitted electron is maintained. By detecting the energy loss electron in coincidence with the emitted electron [F.J. Pijper and P. Kruit, Phys. Rev. B 44 (1991) 9192] a new high spatial resolution mode of analysis comes available, comparable to X-ray generated Auger spectroscopy and photoelectron spectroscopy [F.J. Pijper et al., Scanning Microsc. 3 (1989) 65].
引用
收藏
页码：1067 / 1069
页数：3
相关论文
共 50 条
  • [1] Nanometer resolution of liquid surfaces topography by scanning force microscopy
    Fery, A
    Pompe, T
    Herminghaus, S
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 216 : U604 - U604
  • [2] Analysis of active micromembranes with nanometer resolution
    Aswendt, P
    Dean, T
    PHOTONICS IN MEASUREMENT, 2004, 1844 : 151 - 161
  • [3] A platform to parallelize planar surfaces and control their spatial separation with nanometer resolution
    Ganjeh, Y.
    Song, B.
    Pagadala, K.
    Kim, K.
    Sadat, S.
    Jeong, W.
    Kurabayashi, K.
    Meyhofer, E.
    Reddy, P.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (10):
  • [4] Detecting the Topographic, Chemical and Magnetic Contrast at Surfaces With Nanometer Spatial Resolution
    Zanin, D. A.
    Erbudak, M.
    De Pietro, L. G.
    Cabrera, H.
    Vindigni, A.
    Pescia, D.
    Ramsperger, U.
    2014 TENTH INTERNATIONAL VACUUM ELECTRON SOURCES CONFERENCE (IVESC), 2014,
  • [5] Chemical surface analysis with nanometer depth resolution
    Hauert, Roland
    Keller, Beat A.
    CHIMIA, 2006, 60 (11) : A800 - A804
  • [6] Sub-Nanometer Resolution for the Inspection of Reflective Surfaces Using White Light
    Jueptner, Werner
    Bothe, Thorsten
    BIOSENSING II, 2009, 7397
  • [7] Sub-Nanometer Resolution for the Inspection of Reflective Surfaces Using White Light
    Jueptner, Werner
    Bothe, Thorsten
    SPINTRONICS II, 2009, 7398
  • [8] Direct Mapping of Ion Diffusion Times on LiCoO2 Surfaces with Nanometer Resolution
    Guo, S.
    Jesse, S.
    Kalnaus, S.
    Balke, N.
    Daniel, C.
    Kalinin, S. V.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011, 158 (08) : A982 - A990
  • [9] Complex for elemental analysis of subsurface layers with nanometer depth resolution
    Kamyshan, A. S.
    Komarov, F. F.
    Danilevich, V. V.
    Grishan, P. A.
    DEVICES AND METHODS OF MEASUREMENTS, 2010, (01): : 17 - 22
  • [10] NANOMETER-RESOLUTION SURFACE-ANALYSIS WITH AUGER ELECTRONS
    LIU, J
    HEMBREE, GG
    SPINNLER, GE
    VENABLES, JA
    ULTRAMICROSCOPY, 1993, 52 (3-4) : 369 - 376
12345