PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION OF TIN OXIDE COATINGS

被引：2
|
作者：
INAL, OT
BENGISU, M
GUARDIAN, J
机构：
[1] Materials and Metallurgical Engineering Department, New Mexico Tech, Socorro, 87801, New Mexico
来源：
JOURNAL OF MATERIALS SCIENCE | 1993年 / 28卷 / 05期
关键词：
D O I：
10.1007/BF01191946
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A feasibility study was performed to assess the potential of plasma-assisted chemical vapour deposition as a method for the coating of carbon fibre bundles. Rayon-based carbon filaments, in 2000-filament tows, were coated with SnO2. Direct-current and hollow-cathode discharges generated in an SnCl4-O2 medium helped to deposit the SnO2 coatings on fibres that were heated to approximately 800-degrees-C, by plasma bombardment, and kept in the plasma for 15 min. Both routes were shown to produce uniform and well adhered coatings, and also to offer advantages in terms of processing temperature and the possibility of continuous processing.
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页码：1155 / 1160
页数：6
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