SPATIAL-FREQUENCY DOUBLING LITHOGRAPHY (SFDL) OF PERIODIC STRUCTURES FOR INTEGRATED OPTICAL CIRCUIT TECHNOLOGY

被引：5
|
作者：
JEWELL, TE
WHITE, DL
机构：
来源：
JOURNAL OF LIGHTWAVE TECHNOLOGY | 1989年 / 7卷 / 09期
关键词：
D O I：
10.1109/50.50718
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1386 / 1393
页数：8
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