FORMATION AND PROPERTIES OF POROUS SILICON AND ITS APPLICATION

被引:148
|
作者
WATANABE, Y [1 ]
ARITA, Y [1 ]
YOKOYAMA, T [1 ]
IGARASHI, Y [1 ]
机构
[1] NIPPON TELE & TEL PUBL CORP,ELECT COMMUN LAB,MUSASHINO,TOKYO,JAPAN
关键词
D O I
10.1149/1.2134015
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1351 / 1355
页数:5
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