THERMAL-OXIDATION OF NICKEL DISILICIDE

被引：45
|
作者：
BARTUR, M
NICOLET, MA
机构：
来源：
APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 02期
关键词：
D O I：
10.1063/1.93033
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：175 / 177
页数：3
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