CALIBRATION OF THE ELECTRICAL RESPONSE OF PIEZOELECTRIC ELEMENTS AT LOW-VOLTAGE USING LASER INTERFEROMETRY

被引：19
|
作者：
RIIS, E [1 ]
SIMONSEN, H [1 ]
WORM, T [1 ]
NIELSEN, U [1 ]
BESENBACHER, F [1 ]
机构：
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 25期
关键词：
D O I：
10.1063/1.101064
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2530 / 2531
页数：2
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