THE ANGULAR-DISTRIBUTIONS OF SPUTTERED PARTICLES FROM NICKEL

被引：4
|
作者：
FAYAZOV, IM
GARIN, SN
SIDOROV, AV
YUNUSOV, AI
机构：
[1] Institute of Nuclear Physics, Moscow State University
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1992年 / 124卷 / 02期
关键词：
SPUTTERING; NI AND CU; ION BOMBARDMENT;
D O I：
10.1080/10420159208220191
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
The angular distributions of sputtered particles for the 30 keV Ar-Ni combination have been experimentally studied using the collector technique. The distributions for the ion incidence angle in interval of 0°-80° relative to a surface normal were measured. The influence of both a direct ejection mechanism and collision cascade mechanism on the shape of these distributions has been discussed. The causes of difference between the shapes of the angular distributions of sputtered particles of nickel and the same distributions of copper are discussed too. © 1992, Taylor & Francis Group, LLC. All rights reserved.
引用
收藏
页码：197 / 202
页数：6
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