共 50 条
- [22] Gas-phase reaction pathways from SiH4 to Si2H6, Si2H4 and Si2H2:: A theoretical study JOURNAL OF PHYSICAL CHEMISTRY A, 2003, 107 (16): : 2954 - 2963
- [24] Growth Evolution of Si:H Prepared with SiH4 + Si2H6 as Studied by Real Time Spectroscopic Ellipsometry 2013 IEEE 39TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2013, : 605 - 609
- [25] GLOW-DISCHARGE DEPOSITION OF A-SI-H FROM PURE SI2H6 AND PURE SIH4 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (02): : L115 - L117
- [26] Comparison of SiH4 and Si2H6 RTCVD kinetics using in-situ spectroscopic ellipsometry RAPID THERMAL AND INTEGRATED PROCESSING VI, 1997, 470 : 115 - 120
- [30] Ab initio surface reaction energetics of SiH4 and Si2H6 on Si(001)-2x2 -: art. no. 174703 JOURNAL OF CHEMICAL PHYSICS, 2005, 123 (17):