LASER DIRECT WRITING OF GOLD TO REPAIR DEFECTIVE LINES IN THIN-FILM METALLIZATIONS

被引：3
|
作者：
METZGER, D
REICHL, H
机构：
[1] Forschungsschwerpunkt Technologien der Mikroperipherik, TU Berlin, D-1000 Berlin 65, Sekr. TIB 4/2-1, Geb. 17
来源：
APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(93)90484-S
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Laser chemical vapour deposition (LCVD) with dimethylgold hexafluoroacetylacetonate was used to repair defective lines in thin-film metallizations on alumina ceramic and polyimide. A process is described to deposit gold on polyimide and various substrates. Different patterns were deposited. Resistivities on polyimide have been achieved which are lower than 4.7 muOMEGA . cm, which is twice the value of bulk gold. Bond strengths of 10 N/mm2 were measured on polyimide. With this method contacts have been produced to thin-film gold metallizations. Contact resistances have been measured in the range of 5-10 mOMEGA.
引用
收藏
页码：69 / 74
页数：6
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